Peter Chen
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Peter Chen

Professionally provide Rapid Thermal Processing, Plasma Asher, Plasma Etch, Sputter deposition and Metal Film Metrology semiconductor equipment from 2000

Morgan Hill, California, United States
Member since September 18, 2009
Professionally provide Rapid Thermal Processing, Plasma Asher, Plasma Etch, Sputter deposition and Metal Film Metrology semiconductor equipment Quote_down
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Professionally provide Rapid Thermal Processing, Plasma Asher, Plasma Etch, Sputter deposition and Metal Film Metrology semiconductor equipment.


Allwin21 Corp. was formed in 2000 with a focus on professionally providing Rapid Thermal Process, Plasma Asher Strip / Descum, Plasma Etch/RIE, Sputter Deposition and Metal Film Metrology high-tech semiconductor equipment, services and technical support in Semiconductor III-V, MEMS, Biomedical, Nanotechnology, Solar, Battery & LED industries.  We endeavor to be a leader in our product lines.

We focus on extending product lifecycle, providing solutions, and engineering enhancements to many production proven semiconductor process equipment most directly related to III-V processing.  These semiconductor equipment have been used in production and R&D since the 1990′s.  They have proven processes and research.  Allwin21 Corp. customizes these systems with Allwin21′s comparable integrated process control system with PC, solid robotic wafer transfer system, and new critical components.  This is to achieve the goal of giving our customers a production edge, with right cost, and without having to worry about obsolete parts.

Allwin21 Corp. is the exclusive licensed manufacturer of AG Associates Heatpulse 610 Rapid Thermal Process tool.  We are manufacturing the new AccuThermo AW Series Rapid Thermal Processors. Compared with traditional RTP systems, Allwin21’s AccuThermo AW RTPs have innovative software and more advanced real time temperature control technologies to achieve the BEST rapid thermal processing performance (repeatability, uniformity, and stability) with decades of research directly applicable to ours.

We have maintained a global presence that has grown and expanded into the major high-tech manufacturing areas of the world.  We pride ourselves on developing and continuing lasting customer relationships.

We understand that a timely responsive support and service are critical elements in semiconductor industries. Allwin21’s experienced engineer team is the best guarantee for high quality service and support.  We provide on-site installation, training, maintenance, system optimization, retrofits, and/or customized upgrades

What sets us apart from the competition… 

1)     Exclusive licensed manufacturer of Heatpulse 610 of AG Associates.

2)     Advanced Allwin21 Real Time PC Control Technology.

3)     Focus on Production-Proven process technology.

4)     Integrated 3-axis solid robotic wafer transfer technology.

5)     Experienced local engineer support.

6)     Products made in U.S.A

Main Products:

Rapid Thermal Process

AccuThermo AW410
AccuThermo AW610
AccuThermo AW810
AccuThermo AW820
AccuThermo AW610V
AccuThermo AW820V

Sputter Deposition

AccuSputter AW4450
Perkin Elmer 4400
Perkin Elmer 4410
Perkin Elmer 4450

Plasma Ash/Descum


Plasma Etch/RIE

TTW AW-901eR
TTW AW-903eR

Metal Film Metrology


Upgrade Kits for :

AG Associates Heatpulse 210, Minipulse 310, Heatpulse 410, Heatpulse 610 Rapid Thermal Processing equipment; Tegal 901e, Tegal 903e, Gasonics AE 2001, Matrix 303, Matrix 403, Lam AutoEtch 490, Lam AutoEtch 590, Lam AutoEtch 690, Lam AutoEtch 790, Lam AutoEtch 480, Lam AutoEtch 580, Lam AutoEtch 680, Lam AutoEtch 780 Plasma Etcher equipment;Matrix 105, Matrix 106,Matrix 205, Matrix 101,Matrix 102,Matrix 103, Matrix 104, Matrix 10, Gasonics Aura 1000, Gasonics Aura 3000, Gasonics Aura 3010, Gasonics L3510, Branson/IPC 2000, Branson/IPC 3000, Branson/IPC 4000 Plasma Asher ,Plasma Descum Equipment; Perkin-Elmer 4400, Perkin-Elmer 4410, Perkin-Elmer 4450, Perkin-Elmer 4480, Perkin-Elmer 2400 sputter deposition systems